The Candela Instruments family of Optical Surface Analyzers was first developed for inspection of hard disk
substrates, then extended to inspection of wafer substrates.
• Examples of Substrate and Epi inspection /Substrates: Sapphire and SiC /Automatic Defect Classification /
Versatile Analysis Capabilities / Comparison to V isual Inspection.
• The CS10 (manual) and CS20 (automated) are the newest products, can measure both opaque and transparent
wafers from 2 to 8 inches in diameter. 
