原子力显微镜

Over 33 years experience for AFM tools • Scan length: 50*50um or 100*100um • Z scanner: 15um, 30um • Profiler noise: < 0 02nm • Stage movement X-Y: 150*150mm or 200*200mm • Stage movement Z: 25mm Wafer size: 2” 3” 4” 6” 8?